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Specification
1.Epitaxial Parameters




2.Epitaxial Parameters

 
Layer Thickness
AlN 500nm
Buffer ~
Sapphire Substrate 650±25μm

3. Substrate Parameters

Substrate: Sapphire substrate C-plane
Substrate Diameter: 100.0±0.2mm
Substrate Surface: Single side polished or Double side polished


4. Reference:

2"/3"/4"/6" sapphire substrate is available
RMS(AFM)<1nm
Thickness uniformity < 10%
A/R/M-Plane and C off-cut M/A 0~10°sapphires are available.
Single and double side polished sapphires are available.

Epitaxial structure and substrate specifications can be customized, anna@jxtwafer.com,shirley@jxtwafer.com
SKU: --
4 inch AlN on Sapphire Epitaxial Wafer
Thickness
  • 650μm
Pieces
  • 1pcs
  • 10pcs
  • 50pcs
Surface
  • SSP
  • DSP
Epitaxial layer thickness
  • 500nm
Stock: 5999994
Quantity
$0.00 ~ 800.00

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DESCRIPTION
4‑inch AlN on Sapphire Epitaxial Wafer (AlN template) is high‑quality undoped aluminum nitride thin‑film epitaxially deposited on C‑plane sapphire substrate. It features wide band‑gap property, excellent deep‑ultraviolet transparency, high thermal conductivity, low dislocation density and epi‑ready ultra‑smooth surface. This wafer serves as an ideal buffer template for subsequent AlGaN and GaN epitaxy. It is widely used for DUV‑LED, ultraviolet laser diodes, RF‑HEMT, SAW filters and nitride‑based semiconductor research projects. Custom‑tailored AlN film thickness, surface roughness and cleaning grade are available on request.
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