Specification
1.Epitaxial Parameters

2.Epitaxial Parameters
3. Substrate Parameters
Substrate: Sapphire substrate C-plane
Substrate Diameter: 100.0±0.2mm
Substrate Surface: Single side polished or Double side polished
4. Reference:
2"/3"/4"/6" sapphire substrate is available
RMS(AFM)<1nm
Thickness uniformity < 10%
A/R/M-Plane and C off-cut M/A 0~10°sapphires are available.
Single and double side polished sapphires are available.
Epitaxial structure and substrate specifications can be customized, anna@jxtwafer.com,shirley@jxtwafer.com

2.Epitaxial Parameters
| Layer | Thickness |
| AlN | 500nm |
| Buffer | ~ |
| Sapphire Substrate | 650±25μm |
3. Substrate Parameters
Substrate: Sapphire substrate C-plane
Substrate Diameter: 100.0±0.2mm
Substrate Surface: Single side polished or Double side polished
4. Reference:
2"/3"/4"/6" sapphire substrate is available
RMS(AFM)<1nm
Thickness uniformity < 10%
A/R/M-Plane and C off-cut M/A 0~10°sapphires are available.
Single and double side polished sapphires are available.
Epitaxial structure and substrate specifications can be customized, anna@jxtwafer.com,shirley@jxtwafer.com
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#没有设置高宽参数,将以原图输出)
#没有设置高宽参数,将以原图输出)