Specification
1. Structure

2.Epitaxial Parameters
3.Substrate Parameters
Substrate Diameter: 150.0±0.3mm
Substrate Thickness: 350±25μm
Substrate Type: 4H-N type
4. Reference:
1"/2"/3"/ 4"/ 6" SiC substrate(10*10mm etc.) is available.
4H and 6H SiC substrates are available.
Thickness uniformity < 10%
Wafer Bow<60um,Typical
N-type, p-type or semi-insulating SiC epitaxial layers is available.
Epitaxial structure and substrate specifications can be customized, Contact: anna@jxtwafer.com,shirley@jxtwafer.com

2.Epitaxial Parameters
| Item | Thickness | Doping type | Doping Concentration |
| Epitaxial layer | 10μm | P type/N type | 1E14~1E19cm-3 |
| Buffer | 1μm | N-type | 1.00E±18cm-3 |
3.Substrate Parameters
Substrate Diameter: 150.0±0.3mm
Substrate Thickness: 350±25μm
Substrate Type: 4H-N type
4. Reference:
1"/2"/3"/ 4"/ 6" SiC substrate(10*10mm etc.) is available.
4H and 6H SiC substrates are available.
Thickness uniformity < 10%
Wafer Bow<60um,Typical
N-type, p-type or semi-insulating SiC epitaxial layers is available.
Epitaxial structure and substrate specifications can be customized, Contact: anna@jxtwafer.com,shirley@jxtwafer.com
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#没有设置高宽参数,将以原图输出)