Home/ Products / Silicon Carbide Wafer (SiC Wafer) / Silicon Carbide Epitaxial Wafer
Specification
1. Structure



2.Epitaxial Parameters
 
Item Thickness Doping type Doping Concentration
Epitaxial layer 10μm P type/N type 1E14~1E19cm-3
Buffer 1μm N-type 1.00E±18cm-3


3.Substrate Parameters

Substrate Diameter: 150.0±0.3mm
Substrate Thickness: 350±25μm
Substrate Type: 4H-N type

4. Reference: 

1"/2"/3"/ 4"/ 6" SiC substrate(10*10mm etc.) is available.
4H and 6H SiC substrates are available.
Thickness uniformity < 10% 
Wafer Bow<60um,Typical
N-type, p-type or semi-insulating SiC epitaxial layers is available.

Epitaxial structure and substrate specifications can be customized, Contact: anna@jxtwafer.com,shirley@jxtwafer.com

 
 
SKU: --
6 inch SiC on SiC Homoepitaxial Wafer
Thickness
  • 350μm
Epitaxial
  • 10μm
Pieces
  • 1pcs
  • 10pcs
  • 50pcs
Stock: 299997
Quantity
$600.00 ~ 800.00

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DESCRIPTION
Our 6-inch SiC-on-SiC homoepitaxial wafer is produced by high-precision CVD epitaxy growth on premium monocrystalline SiC substrate. It features excellent thickness uniformity, ultra-low defect density, and highly stable and controllable doping distribution. Available in N-type and P-type with customizable epitaxial thickness and doping concentration. With larger size, higher flatness and better batch consistency, this wafer is ideal for mass production of high-voltage SiC MOSFETs, SBDs, power electronic devices and high-frequency RF components. It is also widely used for advanced semiconductor research and device prototyping.
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