Home/ Products / Silicon Carbide Wafer (SiC Wafer) / Silicon Carbide Epitaxial Wafer
Specification
1. Structure



2.Epitaxial Parameters
 
Item Thickness Doping type Doping Concentration
Epitaxial layer 10μm P type/N type 1E14~1E19cm-3
Buffer 1μm N-type 1.00E±18cm-3


3.Substrate Parameters

Substrate Diameter: 10*10mm
Substrate Thickness: 350±25μm
Substrate Type: 4H-N type

4. Reference: 

1"/2"/3"/ 4"/ 6" SiC substrate(5*5mm etc.) is available.
4H and 6H SiC substrates are available.
Thickness uniformity < 10% 
Wafer Bow<60um,Typical
N-type, p-type or semi-insulating SiC epitaxial layers is available.

Epitaxial structure and substrate specifications can be customized, Contact: anna@jxtwafer.com,shirley@jxtwafer.com

 
 
SKU: --
10*10mm SiC on SiC Homoepitaxial Wafer
Thickness
  • 350μm
Epitaxial
  • 10μm
Pieces
  • 1pcs
  • 10pcs
  • 50pcs
Stock: 299997
Quantity
$30.00 ~ 100.00

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DESCRIPTION

This square‑shaped SiC homoepitaxial specimen adopts premium polished silicon‑carbide substrate. High‑quality SiC epitaxial film is deposited by CVD process.

It boasts favourable thickness uniformity, low surface‑defect density and adjustable doping concentration. Both N‑type and P‑type are optional.

The compact 10*10 mm substrate is perfectly suited for laboratory epitaxy tests, material characterization, SEM‑TEM inspection, small‑scale device prototyping, high‑temperature‑resistant component and optoelectronic‑related research. Research‑grade stock is available, and custom requirements on epitaxial‑layer parameter are welcomed.

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